| Estonia | | 3 598 | 3 690 | 3 714 | 3 514 |
| Harju county | | 2 124 | 2 192 | 2 215 | 2 067 |
| Tallinn | | 1 644 | 1 690 | 1 708 | 1 583 |
| Harju county, excl. Tallinn | | .. | 502 | 507 | 484 |
| Hiiu county | | 18 | 19 | 16 | 16 |
| Ida-Viru county | | 191 | 205 | 202 | 189 |
| Narva city | | 60 | 69 | 73 | 67 |
| Ida-Viru county, excl. Narva city | | .. | 136 | 129 | 122 |
| Jõgeva county | | 56 | 56 | 55 | 54 |
| Järva county | | 73 | 71 | 70 | 73 |
| Lääne county | | 39 | 36 | 34 | 35 |
| Lääne-Viru county | | 134 | 135 | 136 | 132 |
| Põlva county | | 38 | 31 | 32 | 30 |
| Pärnu county | | 185 | 189 | 191 | 182 |
| Pärnu city as a settlement unit | | 105 | 101 | 102 | 98 |
| Pärnu county, excl. Pärnu city | | .. | 88 | 89 | 84 |
| Rapla county | | 61 | 65 | 63 | 61 |
| Saare county | | 68 | 67 | 67 | 69 |
| Tartu county | | 397 | 403 | 407 | 395 |
| Tartu city as a settlement unit | | 281 | 278 | 281 | 272 |
| Tartu county, excl. Tartu city | | .. | 125 | 126 | 123 |
| Valga county | | 49 | 51 | 55 | 49 |
| Viljandi county | | 98 | 100 | 102 | 97 |
| Võru county | | 66 | 69 | 69 | 65 |